Original language | English |
---|---|
Pages (from-to) | 77-82 |
Journal | Microelectronic Engineering |
Volume | 153 |
DOIs | |
Publication status | Published - 2016 |
Bibliographical note
HarvestKeywords
- masks
- nanostructures
- EBID
- Dry etching
IGC Weppelman, PC Post, CTH Heerkens, CW Hagen, JP Hoogenboom
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 77-82 |
Journal | Microelectronic Engineering |
Volume | 153 |
DOIs | |
Publication status | Published - 2016 |