5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability

Arthur C. De Oliveira; Jarno Groenesteijn; Remco J. Wiegerink; Kofi A.A. Makinwa

doi:10.1109/ISSCC42613.2021.9365946

5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability

Arthur C. De Oliveira, Jarno Groenesteijn, Remco J. Wiegerink, Kofi A.A. Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

113 Downloads (Pure)

Abstract

Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4] and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.

Original language	English
Title of host publication	2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	84-86
Number of pages	3
ISBN (Electronic)	9781728195490
DOIs	https://doi.org/10.1109/ISSCC42613.2021.9365946
Publication status	Published - 2021
Event	2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - San Francisco, United States Duration: 13 Feb 2021 → 22 Feb 2021

Publication series

Name	Digest of Technical Papers - IEEE International Solid-State Circuits Conference
Volume	64
ISSN (Print)	0193-6530

Conference

Conference	2021 IEEE International Solid-State Circuits Conference, ISSCC 2021
Country/Territory	United States
City	San Francisco
Period	13/02/21 → 22/02/21

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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10.1109/ISSCC42613.2021.9365946

5.7_A_MEMS_Coriolis_Mass_Flow_Sensor_with_300__g_h_Hz_Resolution_and__0.8mg_h_Zero_StabilityFinal published version, 377 KB

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De Oliveira, A. C., Groenesteijn, J., Wiegerink, R. J., & Makinwa, K. A. A. (2021). 5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. In 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers (pp. 84-86). Article 9365946 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 64). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/ISSCC42613.2021.9365946

De Oliveira, Arthur C. ; Groenesteijn, Jarno ; Wiegerink, Remco J. et al. / 5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers (IEEE), 2021. pp. 84-86 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference).

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title = "5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability",

abstract = "Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4] and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.",

author = "{De Oliveira}, {Arthur C.} and Jarno Groenesteijn and Wiegerink, {Remco J.} and Makinwa, {Kofi A.A.}",

note = "Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 ; Conference date: 13-02-2021 Through 22-02-2021",

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De Oliveira, AC, Groenesteijn, J, Wiegerink, RJ & Makinwa, KAA 2021, 5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. in 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers., 9365946, Digest of Technical Papers - IEEE International Solid-State Circuits Conference, vol. 64, Institute of Electrical and Electronics Engineers (IEEE), pp. 84-86, 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021, San Francisco, United States, 13/02/21. https://doi.org/10.1109/ISSCC42613.2021.9365946

5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. / De Oliveira, Arthur C.; Groenesteijn, Jarno; Wiegerink, Remco J. et al.
2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers (IEEE), 2021. p. 84-86 9365946 (Digest of Technical Papers - IEEE International Solid-State Circuits Conference; Vol. 64).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - De Oliveira, Arthur C.

AU - Groenesteijn, Jarno

AU - Wiegerink, Remco J.

AU - Makinwa, Kofi A.A.

N1 - Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2021

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N2 - Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4] and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.

AB - Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4] and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.

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M3 - Conference contribution

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T3 - Digest of Technical Papers - IEEE International Solid-State Circuits Conference

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BT - 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers

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ER -

De Oliveira AC, Groenesteijn J, Wiegerink RJ, Makinwa KAA. 5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability. In 2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers. Institute of Electrical and Electronics Engineers (IEEE). 2021. p. 84-86. 9365946. (Digest of Technical Papers - IEEE International Solid-State Circuits Conference). doi: 10.1109/ISSCC42613.2021.9365946

5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability

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