5.7 A MEMS Coriolis Mass Flow Sensor with 300 μ g/h/√Hz Resolution and ± 0.8mg/h Zero Stability

Arthur C. De Oliveira, Jarno Groenesteijn, Remco J. Wiegerink, Kofi A.A. Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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Abstract

Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids [1] or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature [4] and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.

Original languageEnglish
Title of host publication2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Pages84-86
Number of pages3
ISBN (Electronic)9781728195490
DOIs
Publication statusPublished - 2021
Event2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - San Francisco, United States
Duration: 13 Feb 202122 Feb 2021

Publication series

NameDigest of Technical Papers - IEEE International Solid-State Circuits Conference
Volume64
ISSN (Print)0193-6530

Conference

Conference2021 IEEE International Solid-State Circuits Conference, ISSCC 2021
CountryUnited States
CitySan Francisco
Period13/02/2122/02/21

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