Precision flow sensors are widely used in the pharmaceutical, food, and semiconductor industries to measure small amounts (<1 gram/hour) of liquids and gases. MEMS thermal flow sensors currently achieve state-of-the-art performance in terms of resolution, size, and power consumption [1, 3]. However, they only measure volumetric flow, and so must be calibrated for use with specific liquids  or gases [2, 3]. In contrast, Coriolis flow sensors measure mass flow and thus do not need calibration for specific fluids. Furthermore, their resonance frequency can be used as a measure of fluid density. These features enable significant size, cost, and complexity reductions in low-flow microfluidic systems. Although much progress has been made, miniature  and MEMS [5- 7] Coriolis mass flow sensors are still outperformed by their thermal counterparts, especially in terms of resolution and long-term stability.
|Title of host publication||2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - Digest of Technical Papers|
|Publisher||Institute of Electrical and Electronics Engineers (IEEE)|
|Number of pages||3|
|Publication status||Published - 2021|
|Event||2021 IEEE International Solid-State Circuits Conference, ISSCC 2021 - San Francisco, United States|
Duration: 13 Feb 2021 → 22 Feb 2021
|Name||Digest of Technical Papers - IEEE International Solid-State Circuits Conference|
|Conference||2021 IEEE International Solid-State Circuits Conference, ISSCC 2021|
|Period||13/02/21 → 22/02/21|
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