6.4 mm Diameter Silicon Micromachined Lens for THz Dielectric Antenna

Choonsup Lee, Goutam Chattopadhyay, Maria Alonso Del Pino, Nuria Llombart

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

4 Citations (Scopus)


In this paper, we have microfabricated a 6.4 mm diameter silicon lens array on a 4 inch silicon wafer using silicon micromachining technique. The goal of this lens array is to build a 2×2 lens antenna array for 1.9 THz receiver application. It requires multiple thick photoresist coatings and long selective etching of silicon and photoresist after thermal reflow process. To the authors' knowledge, this is the biggest silicon lens ever microfabricated by semiconductor process.

Original languageEnglish
Title of host publicationProceedings - 2014 39th International Conference on Infrared, Millimeter, and Terahertz Waves
EditorsP.H. Siegel, C. Walker
Number of pages1
ISBN (Electronic)978-1-4799-3877-3
Publication statusPublished - 2014
EventIRMMW-THz 2014: 39th International Conference on Infrared, Millimeter and Terahertz Waves - Tucson, AZ, United States
Duration: 14 Sep 201419 Sep 2014
Conference number: 39


ConferenceIRMMW-THz 2014
CountryUnited States
CityTucson, AZ


  • Lenses
  • Silicon
  • Resists
  • Arrays
  • Antenna arrays
  • Etching
  • Micromachining


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