A β-Compensated NPN-Based Temperature Sensor With ±0.1 °C (3σ) Inaccuracy From -55 °C to 125 °C and 200fJ · K² Resolution FoM

This article presents a CMOS temperature sensor that achieves both state-of-the-art energy efficiency and accuracy. An NPN-based front end uses two resistors to efficiently generate a PTAT and CTAT current, whose ratio is then digitized by a continuous-time (CT) Δ Σ -modulator. A β-compensation technique is used to mitigate base current errors associated with the NPN's finite β. Component mismatch and 1/f noise are mitigated by applying chopping and dynamic element matching (DEM), while the spread in V_BE and the ratio of the two resistors are digitally trimmed at room temperature (RT). Fabricated in a 0.18-μ m CMOS process, the sensor draws 2.5μ A from a supply voltage ranging from 1.4 to 2.2 V. Measurements on 40 samples show that it achieves an inaccuracy of ± 0.1° C (3Σ ) from - 55° C to 125° C. Furthermore, it is both highly energy efficient, with a resolution figure of merit (FoM) of 200fJċK² , as well as very compact, occupying only 0.07 mm2.