A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation

Vikram Chaturvedi; Mohammad Reza Nabavi; Johan Vogel; Kofi A.A. Makinwa; Stoyan Nihtianov

doi:10.1109/ISSCC.2017.7870317

A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation

Vikram Chaturvedi, Mohammad Reza Nabavi, Johan Vogel, Kofi A.A. Makinwa, Stoyan Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Abstract

Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose, but they are bulky and costly. Capacitive sensors [1], though compact, are sensitive to environment and require electrical access to the target. Eddy-current sensors (ECSs) do not have these disadvantages, but their resolution and stability are limited by the skin-effect [2-5]. For sub-nm measurements, this can be alleviated by using excitation frequencies >100MHz. This calls for stable flat sensing coils (to minimize parasitics) in close proximity to the ECS interface, whose power dissipation must then be low enough to avoid self-heating and displacement errors due to thermal expansion [2,6].

Original language	English
Title of host publication	2017 IEEE International Solid-State Circuits Conference, ISSCC 2017
Subtitle of host publication	Digest of Technical Papers
Editors	Laura C. Fujino
Place of Publication	Danvers, MA
Publisher	IEEE
Pages	174-175
Number of pages	2
Volume	60
ISBN (Electronic)	978-1-5090-3758-2
ISBN (Print)	978-1-5090-3757-5
DOIs	https://doi.org/10.1109/ISSCC.2017.7870317
Publication status	Published - 2017
Event	ISSCC 2017: 64th IEEE International Solid-State Circuits Conference - San Francisco, CA, United States Duration: 5 Feb 2017 → 9 Feb 2017

Conference

Conference	ISSCC 2017
Country/Territory	United States
City	San Francisco, CA
Period	5/02/17 → 9/02/17

Keywords

Coils
Oscillators
Mixers
Sensor phenomena and characterization
Inductance
Capacitors

Access to Document

10.1109/ISSCC.2017.7870317

Cite this

Chaturvedi, V., Nabavi, M. R., Vogel, J., Makinwa, K. A. A., & Nihtianov, S. (2017). A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation. In L. C. Fujino (Ed.), 2017 IEEE International Solid-State Circuits Conference, ISSCC 2017: Digest of Technical Papers (Vol. 60, pp. 174-175). Article 7870317 IEEE. https://doi.org/10.1109/ISSCC.2017.7870317

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title = "A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation",

abstract = "Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose, but they are bulky and costly. Capacitive sensors [1], though compact, are sensitive to environment and require electrical access to the target. Eddy-current sensors (ECSs) do not have these disadvantages, but their resolution and stability are limited by the skin-effect [2-5]. For sub-nm measurements, this can be alleviated by using excitation frequencies >100MHz. This calls for stable flat sensing coils (to minimize parasitics) in close proximity to the ECS interface, whose power dissipation must then be low enough to avoid self-heating and displacement errors due to thermal expansion [2,6].",

keywords = "Coils, Oscillators, Mixers, Sensor phenomena and characterization, Inductance, Capacitors",

author = "Vikram Chaturvedi and Nabavi, {Mohammad Reza} and Johan Vogel and Makinwa, {Kofi A.A.} and Stoyan Nihtianov",

year = "2017",

doi = "10.1109/ISSCC.2017.7870317",

language = "English",

isbn = "978-1-5090-3757-5",

volume = "60",

pages = "174--175",

editor = "Fujino, {Laura C.}",

booktitle = "2017 IEEE International Solid-State Circuits Conference, ISSCC 2017",

publisher = "IEEE",

address = "United States",

note = "ISSCC 2017 : 64th IEEE International Solid-State Circuits Conference ; Conference date: 05-02-2017 Through 09-02-2017",

}

Chaturvedi, V, Nabavi, MR, Vogel, J, Makinwa, KAA & Nihtianov, S 2017, A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation. in LC Fujino (ed.), 2017 IEEE International Solid-State Circuits Conference, ISSCC 2017: Digest of Technical Papers. vol. 60, 7870317, IEEE, Danvers, MA, pp. 174-175, ISSCC 2017, San Francisco, CA, United States, 5/02/17. https://doi.org/10.1109/ISSCC.2017.7870317

A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation. / Chaturvedi, Vikram; Nabavi, Mohammad Reza; Vogel, Johan et al.
2017 IEEE International Solid-State Circuits Conference, ISSCC 2017: Digest of Technical Papers. ed. / Laura C. Fujino. Vol. 60 Danvers, MA: IEEE, 2017. p. 174-175 7870317.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AU - Chaturvedi, Vikram

AU - Nabavi, Mohammad Reza

AU - Vogel, Johan

AU - Makinwa, Kofi A.A.

AU - Nihtianov, Stoyan

PY - 2017

Y1 - 2017

N2 - Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose, but they are bulky and costly. Capacitive sensors [1], though compact, are sensitive to environment and require electrical access to the target. Eddy-current sensors (ECSs) do not have these disadvantages, but their resolution and stability are limited by the skin-effect [2-5]. For sub-nm measurements, this can be alleviated by using excitation frequencies >100MHz. This calls for stable flat sensing coils (to minimize parasitics) in close proximity to the ECS interface, whose power dissipation must then be low enough to avoid self-heating and displacement errors due to thermal expansion [2,6].

AB - Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose, but they are bulky and costly. Capacitive sensors [1], though compact, are sensitive to environment and require electrical access to the target. Eddy-current sensors (ECSs) do not have these disadvantages, but their resolution and stability are limited by the skin-effect [2-5]. For sub-nm measurements, this can be alleviated by using excitation frequencies >100MHz. This calls for stable flat sensing coils (to minimize parasitics) in close proximity to the ECS interface, whose power dissipation must then be low enough to avoid self-heating and displacement errors due to thermal expansion [2,6].

KW - Coils

KW - Oscillators

KW - Mixers

KW - Sensor phenomena and characterization

KW - Inductance

KW - Capacitors

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BT - 2017 IEEE International Solid-State Circuits Conference, ISSCC 2017

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T2 - ISSCC 2017

Y2 - 5 February 2017 through 9 February 2017

ER -

A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation

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