A 0.6nm Resolution 19.8mW Eddy-Current Displacement Sensor Interface with 126MHz Excitation

Vikram Chaturvedi, Mohammad Reza Nabavi, Johan Vogel, Kofi A.A. Makinwa, Stoyan Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

5 Citations (Scopus)

Abstract

Displacement sensing with sub-nanometer resolution is required in advanced metrology and high-tech industry, e.g., to measure the lens position in wafer scanners. Linear encoders and interferometers are often used for this purpose, but they are bulky and costly. Capacitive sensors [1], though compact, are sensitive to environment and require electrical access to the target. Eddy-current sensors (ECSs) do not have these disadvantages, but their resolution and stability are limited by the skin-effect [2-5]. For sub-nm measurements, this can be alleviated by using excitation frequencies >100MHz. This calls for stable flat sensing coils (to minimize parasitics) in close proximity to the ECS interface, whose power dissipation must then be low enough to avoid self-heating and displacement errors due to thermal expansion [2,6].

Original languageEnglish
Title of host publication2017 IEEE International Solid-State Circuits Conference, ISSCC 2017
Subtitle of host publicationDigest of Technical Papers
EditorsLaura C. Fujino
Place of PublicationDanvers, MA
PublisherIEEE
Pages174-175
Number of pages2
Volume60
ISBN (Electronic)978-1-5090-3758-2
ISBN (Print)978-1-5090-3757-5
DOIs
Publication statusPublished - 2017
EventISSCC 2017: 64th IEEE International Solid-State Circuits Conference - San Francisco, CA, United States
Duration: 5 Feb 20179 Feb 2017

Conference

ConferenceISSCC 2017
CountryUnited States
CitySan Francisco, CA
Period5/02/179/02/17

Keywords

  • Coils
  • Oscillators
  • Mixers
  • Sensor phenomena and characterization
  • Inductance
  • Capacitors

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