A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications

Y Zhang

Research output: Thesis › Dissertation (TU Delft)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Kruit, P., Supervisor
Award date	18 Nov 2008
Place of Publication	Delft
Publisher	s.n.
Print ISBNs	978-90-9023706-0
Publication status	Published - 2008

Keywords

@phdthesis{13c036f5ea964404b4c0adefb2faf482,

title = "A 100-electron-beam source from a high brightness Schottky emitter for fast patterning applications",

keywords = "official reports, Diss. prom. aan TU Delft",

author = "Y Zhang",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-90-9023706-0",

publisher = "s.n.",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}