A 117-dB In-Band CMRR 98.5-dB SNR Capacitance-to-Digital Converter for Sub-nm Displacement Sensing with an Electrically Floating Target

Hui Jiang, Samira Amani, Johan G. Vogel, Saleh Heidary Shalmany, Stoyan Nihtianov

Research output: Contribution to journalArticleScientificpeer-review

Abstract

This article describes a high-performance capacitance-to-digital converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5-dB SNR in a 1-ms conversion time. With a sensing O 8-mm probe and a 25μm stand-off distance from the target, it achieves 0.18-nm resolution. Moreover, it offers an in-band common-mode rejection ratio (CMRR) higher than 117 dB, providing decent electric field interference immunity.

Original languageEnglish
Article number8897040
Pages (from-to)9-12
Number of pages4
JournalIEEE Solid-State Circuits Letters
Volume3
Issue number1
DOIs
Publication statusPublished - 1 Dec 2020

Keywords

  • Capacitance-to-digital converter (CDC)
  • chopping
  • electric field interference immunity
  • energy-efficient
  • readout
  • sub-nm displacement sensing

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