TY - JOUR
T1 - A 117-dB In-Band CMRR 98.5-dB SNR Capacitance-to-Digital Converter for Sub-nm Displacement Sensing with an Electrically Floating Target
AU - Jiang, Hui
AU - Amani, Samira
AU - Vogel, Johan G.
AU - Shalmany, Saleh Heidary
AU - Nihtianov, Stoyan
PY - 2020/12/1
Y1 - 2020/12/1
N2 - This article describes a high-performance capacitance-to-digital converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5-dB SNR in a 1-ms conversion time. With a sensing O 8-mm probe and a 25μm stand-off distance from the target, it achieves 0.18-nm resolution. Moreover, it offers an in-band common-mode rejection ratio (CMRR) higher than 117 dB, providing decent electric field interference immunity.
AB - This article describes a high-performance capacitance-to-digital converter (CDC) for sub-nm displacement sensing with an electrically floating target. Intended to be integrated into a displacement sensor probe, the CDC consumes only 560μW. It achieves 98.5-dB SNR in a 1-ms conversion time. With a sensing O 8-mm probe and a 25μm stand-off distance from the target, it achieves 0.18-nm resolution. Moreover, it offers an in-band common-mode rejection ratio (CMRR) higher than 117 dB, providing decent electric field interference immunity.
KW - Capacitance-to-digital converter (CDC)
KW - chopping
KW - electric field interference immunity
KW - energy-efficient
KW - readout
KW - sub-nm displacement sensing
UR - http://www.scopus.com/inward/record.url?scp=85082560422&partnerID=8YFLogxK
U2 - 10.1109/LSSC.2019.2952851
DO - 10.1109/LSSC.2019.2952851
M3 - Article
AN - SCOPUS:85082560422
SN - 2573-9603
VL - 3
SP - 9
EP - 12
JO - IEEE Solid-State Circuits Letters
JF - IEEE Solid-State Circuits Letters
IS - 1
M1 - 8897040
ER -