A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution

Matheus  Pimenta; Çağri Gürleyük; Paul Walsh; Daniel  O’Keeffe; Masoud Babaie; Kofi Makinwa

doi:10.1109/VLSICircuits18222.2020.9162849

A 200μW Eddy Current Displacement Sensor with 6.7nm_RMS Resolution

Matheus Pimenta, Çağri Gürleyük, Paul Walsh, Daniel O’Keeffe, Masoud Babaie, Kofi Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

24 Downloads (Pure)

Abstract

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.

Original language	English
Title of host publication	2020 IEEE Symposium on VLSI Circuits
Subtitle of host publication	Proceedings
Place of Publication	Piscataway
Publisher	IEEE
Pages	1-2
Number of pages	2
ISBN (Electronic)	978-1-7281-9942-9
ISBN (Print)	978-1-7281-9943-6
DOIs	https://doi.org/10.1109/VLSICircuits18222.2020.9162849
Publication status	Published - 2020
Event	2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020 - Honolulu, United States Duration: 16 Jun 2020 → 19 Jun 2020

Conference

Conference	2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020
Country/Territory	United States
City	Honolulu
Period	16/06/20 → 19/06/20

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Access to Document

10.1109/VLSICircuits18222.2020.9162849

09162849Final published version, 459 KB

Cite this

@inproceedings{dafa1c2e72a74cf49e60f4b541ea36ad,

title = "A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution",

abstract = "This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.",

author = "Matheus Pimenta and {\c C}ağri G{\"u}rley{\"u}k and Paul Walsh and Daniel O{\textquoteright}Keeffe and Masoud Babaie and Kofi Makinwa",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ; 2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020 ; Conference date: 16-06-2020 Through 19-06-2020",

year = "2020",

doi = "10.1109/VLSICircuits18222.2020.9162849",

language = "English",

isbn = "978-1-7281-9943-6",

pages = "1--2",

booktitle = "2020 IEEE Symposium on VLSI Circuits",

publisher = "IEEE",

address = "United States",

}

Pimenta, M, Gürleyük, Ç, Walsh, P, O’Keeffe, D, Babaie, M & Makinwa, K 2020, A 200μW Eddy Current Displacement Sensor with 6.7nm_RMS Resolution. in 2020 IEEE Symposium on VLSI Circuits: Proceedings., 9162849, IEEE, Piscataway, pp. 1-2, 2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020, Honolulu, United States, 16/06/20. https://doi.org/10.1109/VLSICircuits18222.2020.9162849

TY - GEN

T1 - A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution

AU - Pimenta, Matheus

AU - Gürleyük, Çağri

AU - Walsh, Paul

AU - O’Keeffe, Daniel

AU - Babaie, Masoud

AU - Makinwa, Kofi

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2020

Y1 - 2020

N2 - This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.

AB - This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.

UR - http://www.scopus.com/inward/record.url?scp=85090227560&partnerID=8YFLogxK

U2 - 10.1109/VLSICircuits18222.2020.9162849

DO - 10.1109/VLSICircuits18222.2020.9162849

M3 - Conference contribution

AN - SCOPUS:85090227560

SN - 978-1-7281-9943-6

SP - 1

EP - 2

BT - 2020 IEEE Symposium on VLSI Circuits

PB - IEEE

CY - Piscataway

T2 - 2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020

Y2 - 16 June 2020 through 19 June 2020

ER -