A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution

Matheus Pimenta, Çağri Gürleyük, Paul Walsh, Daniel O’Keeffe, Masoud Babaie, Kofi Makinwa

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)


This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500μm, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43μm range. It consumes 200μW from a 1.8V supply, which represents a 35× improvement on the state of the art.

Original languageEnglish
Title of host publication2020 IEEE Symposium on VLSI Circuits
Subtitle of host publicationProceedings
Place of PublicationPiscataway
Number of pages2
ISBN (Electronic)978-1-7281-9942-9
ISBN (Print)978-1-7281-9943-6
Publication statusPublished - 2020
Event2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020 - Honolulu, United States
Duration: 16 Jun 202019 Jun 2020


Conference2020 IEEE Symposium on VLSI Circuits, VLSI Circuits 2020
CountryUnited States


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