A 3 ppm 1.5 × 0.8 mm2 1.0 µA 32.768 kHz MEMS-based oscillator

S Zaliasl, JC Salvia, GC Hill, L Chen, K Joo, R Palwai, N Arumugam, M Phadke, S Mukherjee, HC Lee, C Grosjean, PM Hagelin, S Pamarti, TS Fiez, Kofi A.A. Makinwa, A Partridge, V Menon

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