A 80nm thick silicon nanosheet FET for sensing applications

TSY Moh; G Pandraud; HD Tong; LCPM de Smet; EJR Sudholter; c Rijn; PM Sarro

A 80nm thick silicon nanosheet FET for sensing applications

TSY Moh, G Pandraud, HD Tong, LCPM de Smet, EJR Sudholter, c Rijn, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010
Editors	P French et al
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	122-126
Number of pages	5
ISBN (Print)	978-90-73461-67-3
Publication status	Published - 2010
Event	13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands - Utrecht, The Netherlands Duration: 18 Nov 2010 → 19 Nov 2010

Publication series

Name
Publisher	STW

Conference

Conference	13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands
Period	18/11/10 → 19/11/10

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{7c7298aad6f849c49317b1d983c2d50d,

title = "A 80nm thick silicon nanosheet FET for sensing applications",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "TSY Moh and G Pandraud and HD Tong and {de Smet}, LCPM and EJR Sudholter and c Rijn and PM Sarro",

year = "2010",

language = "English",

isbn = "978-90-73461-67-3",

publisher = "STW",

pages = "122--126",

editor = "{French et al}, P",

booktitle = "Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010",

note = "13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands ; Conference date: 18-11-2010 Through 19-11-2010",

}

Moh, TSY, Pandraud, G, Tong, HD, de Smet, LCPM, Sudholter, EJR, Rijn, C & Sarro, PM 2010, A 80nm thick silicon nanosheet FET for sensing applications. in P French et al (ed.), Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010. STW, Utrecht, The Netherlands, pp. 122-126, 13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands, 18/11/10.

TY - GEN

T1 - A 80nm thick silicon nanosheet FET for sensing applications

AU - Moh, TSY

AU - Pandraud, G

AU - Tong, HD

AU - de Smet, LCPM

AU - Sudholter, EJR

AU - Rijn, c

AU - Sarro, PM

PY - 2010

Y1 - 2010

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-67-3

SP - 122

EP - 126

BT - Proceedings 13th SAFE Workshop of the STW.ICT Conference 2010

A2 - French et al, P

PB - STW

CY - Utrecht, The Netherlands

T2 - 13th SAFE Workshop of the STW.ICT Conference 2010, Veldhoven, The Netherlands

Y2 - 18 November 2010 through 19 November 2010

ER -