A back-wafer contacted silicon-on-glass integrated bipolar process - Part I: the conflict electrical versus thermal isolation

LK Nanver, N Nenadovic, V d' Alessandro, H Schellevis, HW van Zeijl, R. Dekker, DB de Mooij, V Zieren, JW Slotboom

Research output: Contribution to journalArticleScientificpeer-review

59 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)42-50
Number of pages9
JournalIEEE Transactions on Electron Devices
Issue number1
Publication statusPublished - 2004


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