@inproceedings{06c7869cf14e4238a66e553390306eeb,
title = "A benchmark solution for multi-dimensional thermal CVD modeling with detailed chemistry.",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "CR Kleijn",
note = "CVDXV",
year = "2000",
language = "Undefined/Unknown",
isbn = "0-471-18531-0",
publisher = "The Electrochemical Society",
pages = "152--159",
editor = "MD Allendorf and ML Hitchman",
booktitle = "Proceedings of the 15th International Conference on Chemical Vapor Deposition.",
}