A benchmark solution for multi-dimensional thermal CVD modeling with detailed chemistry.

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

    Original languageUndefined/Unknown
    Title of host publicationProceedings of the 15th International Conference on Chemical Vapor Deposition.
    EditorsMD Allendorf, ML Hitchman
    PublisherThe Electrochemical Society
    Pages152-159
    Number of pages8
    ISBN (Print)0-471-18531-0
    Publication statusPublished - 2000

    Publication series

    Name
    PublisherThe Electrochemical Society
    Name
    Volume2000-13

    Keywords

    • ZX Int.klas.verslagjaar < 2002

    Cite this