A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions

Tao Wu, Ruochen Lu, Anming Gao, Cheng Tu, Tomas Manzaneque, Songbin Gong

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

This paper presents the design and experimental results of the first chip-scale radio frequency MEMS gyrator based on hybridizing Lorentz-force and piezoelectric transduction. The MEMS gyrator has a non-reciprocal phase response of 180° and can be used as the building blocks for synthesizing complex non-reciprocal networks. The equivalent circuit and measured performance of a fabricated MEMS gyrator are presented, both showing the anticipated 180° phase difference. The demonstration marks the first time that non-reciprocity is attained at radio frequencies with an entirely passive chip-scale mechanical device. Various challenges in achieving strong coupling and low insertion loss for the designed devices will be discussed.

Original languageEnglish
Title of host publicationProceedings of the IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)
Place of PublicationPiscataway, NJ, USA
PublisherIEEE
Pages887-890
ISBN (Electronic)978-1-7281-1610-5
DOIs
Publication statusPublished - 2019
Event32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of
Duration: 27 Jan 201931 Jan 2019

Conference

Conference32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
CountryKorea, Republic of
CitySeoul
Period27/01/1931/01/19

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