A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions

Tao Wu; Ruochen Lu; Anming Gao; Cheng Tu; Tomas Manzaneque; Songbin Gong

doi:10.1109/MEMSYS.2019.8870764

A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions

Tao Wu, Ruochen Lu, Anming Gao, Cheng Tu, Tomas Manzaneque, Songbin Gong

Dynamics of Micro and Nano Systems

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Abstract

This paper presents the design and experimental results of the first chip-scale radio frequency MEMS gyrator based on hybridizing Lorentz-force and piezoelectric transduction. The MEMS gyrator has a non-reciprocal phase response of 180° and can be used as the building blocks for synthesizing complex non-reciprocal networks. The equivalent circuit and measured performance of a fabricated MEMS gyrator are presented, both showing the anticipated 180° phase difference. The demonstration marks the first time that non-reciprocity is attained at radio frequencies with an entirely passive chip-scale mechanical device. Various challenges in achieving strong coupling and low insertion loss for the designed devices will be discussed.

Original language	English
Title of host publication	Proceedings of the IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	887-890
ISBN (Electronic)	978-1-7281-1610-5
DOIs	https://doi.org/10.1109/MEMSYS.2019.8870764
Publication status	Published - 2019
Event	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019

Conference

Conference	32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019
Country/Territory	Korea, Republic of
City	Seoul
Period	27/01/19 → 31/01/19

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10.1109/MEMSYS.2019.8870764

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title = "A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions",

abstract = "This paper presents the design and experimental results of the first chip-scale radio frequency MEMS gyrator based on hybridizing Lorentz-force and piezoelectric transduction. The MEMS gyrator has a non-reciprocal phase response of 180° and can be used as the building blocks for synthesizing complex non-reciprocal networks. The equivalent circuit and measured performance of a fabricated MEMS gyrator are presented, both showing the anticipated 180° phase difference. The demonstration marks the first time that non-reciprocity is attained at radio frequencies with an entirely passive chip-scale mechanical device. Various challenges in achieving strong coupling and low insertion loss for the designed devices will be discussed.",

author = "Tao Wu and Ruochen Lu and Anming Gao and Cheng Tu and Tomas Manzaneque and Songbin Gong",

year = "2019",

doi = "10.1109/MEMSYS.2019.8870764",

language = "English",

pages = "887--890",

booktitle = "Proceedings of the IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019)",

publisher = "IEEE",

address = "United States",

note = "32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 ; Conference date: 27-01-2019 Through 31-01-2019",

}

Wu, T, Lu, R, Gao, A, Tu, C, Manzaneque, T & Gong, S 2019, A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions. in Proceedings of the IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019). IEEE, Piscataway, NJ, USA, pp. 887-890, 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019, Seoul, Korea, Republic of, 27/01/19. https://doi.org/10.1109/MEMSYS.2019.8870764

A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions. / Wu, Tao; Lu, Ruochen; Gao, Anming et al.
Proceedings of the IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019). Piscataway, NJ, USA: IEEE, 2019. p. 887-890.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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AB - This paper presents the design and experimental results of the first chip-scale radio frequency MEMS gyrator based on hybridizing Lorentz-force and piezoelectric transduction. The MEMS gyrator has a non-reciprocal phase response of 180° and can be used as the building blocks for synthesizing complex non-reciprocal networks. The equivalent circuit and measured performance of a fabricated MEMS gyrator are presented, both showing the anticipated 180° phase difference. The demonstration marks the first time that non-reciprocity is attained at radio frequencies with an entirely passive chip-scale mechanical device. Various challenges in achieving strong coupling and low insertion loss for the designed devices will be discussed.

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A chip-scale RF MEMS gyrator via hybridizing Lorentz-force and piezoelectric transductions

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