Abstract
This paper presents the design and experimental results of the first chip-scale radio frequency MEMS gyrator based on hybridizing Lorentz-force and piezoelectric transduction. The MEMS gyrator has a non-reciprocal phase response of 180° and can be used as the building blocks for synthesizing complex non-reciprocal networks. The equivalent circuit and measured performance of a fabricated MEMS gyrator are presented, both showing the anticipated 180° phase difference. The demonstration marks the first time that non-reciprocity is attained at radio frequencies with an entirely passive chip-scale mechanical device. Various challenges in achieving strong coupling and low insertion loss for the designed devices will be discussed.
Original language | English |
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Title of host publication | Proceedings of the IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019) |
Place of Publication | Piscataway, NJ, USA |
Publisher | IEEE |
Pages | 887-890 |
ISBN (Electronic) | 978-1-7281-1610-5 |
DOIs | |
Publication status | Published - 2019 |
Event | 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of Duration: 27 Jan 2019 → 31 Jan 2019 |
Conference
Conference | 32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 |
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Country/Territory | Korea, Republic of |
City | Seoul |
Period | 27/01/19 → 31/01/19 |