A CMOS-Compatible Hybrid Plasmonic Slot Waveguide With Enhanced Field Confinement

Jing Xiao, Qi-Qin Wei, Daoguo Yang, Ping Zhang, Ning He, Guo Qi Zhang, Tian-Ling Ren, Xian-Ping Chen

Research output: Contribution to journalArticleScientificpeer-review

17 Citations (Scopus)
40 Downloads (Pure)


The emerging field of nanophotonics requires plasmonic devices to be fully compatible with semiconductor fabrication techniques. However, very few feasible practical structures exist at present. Here, we propose a CMOS-compatible hybrid plasmonic slot waveguide (HPSW) with enhanced field confinement. Our simulation results show that the HPSW exhibits significantly enhanced field confinement as compared with the traditional low-index slot waveguides and the hybrid metal dielectric slot waveguides. By controlling the thicknesses of different layers, an optimized HPSW structure with a better tradeoff between field confinement and propagation length has been simultaneously achieved.
Original languageEnglish
Pages (from-to)456-458
Number of pages3
JournalIEEE Electron Device Letters
Issue number4
Publication statusPublished - 2016


  • multi-layer structure
  • Hybrid plasmonic slot waveguide
  • field confinement


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