A Compact Sensor Readout Circuit with Combined Temperature, Capacitance and Voltage Sensing Functionality

Bahman Yousefzadeh, Wei Wu, Berry Buter, Kofi Makinwa, Michiel Pertijs

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

15 Citations (Scopus)


This paper presents an area- and energy-efficient sensor readout circuit, which can precisely digitize temperature, capacitance and voltage. The three modes use only on-chip references and employ a shared zoom ADC based on SAR and ΔΣ conversion to save die area. Measurements on 24 samples from a single wafer show a temperature inaccuracy of ±0.2 °C (3σ) over the military temperature range (-55°C to 125°C). The voltage sensing shows an inaccuracy of ±0.5%. The sensor also offers 18.7-ENOB capacitance-to-digital conversion, which handles up to 3.8 pF capacitance with a 0.76 pJ/conv.-step energy-efficiency FoM. It occupies 0.33 mm in a 0.16 μm CMOS process and draws 4.6 μA current from a 1.8 V supply.
Original languageEnglish
Title of host publicationDigest of Technical Papers - 2017 Symposium on VLSI Circuits
Place of PublicationPiscataway, NJ
Number of pages2
ISBN (Electronic)978-4-86348-614-0
ISBN (Print)978-4-86348-606-5
Publication statusPublished - 2017
Event2017 Symposium on VLSI Technology and Circuits: 2017 VLSI Technology Symposium - 2017 VLSI Circuits Symposium - Kyoto, Japan
Duration: 5 Jun 20178 Jun 2017


Conference2017 Symposium on VLSI Technology and Circuits
Internet address

Bibliographical note



  • temperature sensing
  • voltage sensing
  • capacitance-to-digital conversion


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