A comparative study of the strength of Si, SiN and SiC used at nanoscales - Materials and devices

T Alan, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationMaterial research society symposium proceeding
EditorsDA LaVan, MG da Silva, SM Spearing, S Vengallatore
Place of PublicationWarrendale
PublisherMaterials Research Society
Pages1-5
Number of pages5
ISBN (Print)978-1-55899-990-9
Publication statusPublished - 2007
EventMRS fall meeting 2007, Boston, USA - Warrendale
Duration: 26 Nov 200730 Nov 2007

Publication series

Name
PublisherMaterials Research Society
NameMaterials Research Society Symposium Proceedings
Volume1052
ISSN (Print)0272-9172

Conference

ConferenceMRS fall meeting 2007, Boston, USA
Period26/11/0730/11/07

Keywords

  • Conf.proc. > 3 pag

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