A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

G Pandraud; A Purniawan; E Margallo-Balbás; PM Sarro

doi:10.1117/12.922400

A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

G Pandraud, A Purniawan, E Margallo-Balbás, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	Proceeings of SPIE - Nanophotonics IV
Editors	DL Andrews, J-M Nunzi, A Ostendorf
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	1-7
Number of pages	7
ISBN (Print)	9780819491169
DOIs	https://doi.org/10.1117/12.922400
Publication status	Published - 2012
Event	Nanophotonics IV , Brussels, Belgium - Bellingham, WA, USA Duration: 15 Apr 2012 → 19 Apr 2012

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	8424
ISSN (Print)	0277-786X

Conference

Conference	Nanophotonics IV , Brussels, Belgium
Period	15/04/12 → 19/04/12

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harvest

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10.1117/12.922400

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Pandraud, G., Purniawan, A., Margallo-Balbás, E., & Sarro, PM. (2012). A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors. In DL. Andrews, J.-M. Nunzi, & A. Ostendorf (Eds.), Proceeings of SPIE - Nanophotonics IV (pp. 1-7). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 8424). SPIE. https://doi.org/10.1117/12.922400

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isbn = "9780819491169",

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Pandraud, G, Purniawan, A, Margallo-Balbás, E & Sarro, PM 2012, A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors. in DL Andrews, J-M Nunzi & A Ostendorf (eds), Proceeings of SPIE - Nanophotonics IV. Proceedings of SPIE- International Society for Optical Engineering, vol. 8424, SPIE, Bellingham, WA, USA, pp. 1-7, Nanophotonics IV , Brussels, Belgium, 15/04/12. https://doi.org/10.1117/12.922400

A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors. / Pandraud, G; Purniawan, A; Margallo-Balbás, E et al.
Proceeings of SPIE - Nanophotonics IV. ed. / DL Andrews; J-M Nunzi; A Ostendorf. Bellingham, WA, USA: SPIE, 2012. p. 1-7 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 8424).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

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T1 - A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

AU - Pandraud, G

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AU - Margallo-Balbás, E

AU - Sarro, PM

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A2 - Nunzi, J-M

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PB - SPIE

CY - Bellingham, WA, USA

T2 - Nanophotonics IV , Brussels, Belgium

Y2 - 15 April 2012 through 19 April 2012

ER -

A comparison between PECVD and ALD for the fabrication of slot waveguide based sensors

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