A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT)

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX
Editors	P Enoksson
Place of Publication	s.l.
Publisher	Eurosensors
Pages	1-4
Number of pages	4
Publication status	Published - 2006
Event	The 20th European Conference on Solid-State Transducers (Eurosensors XX) - Goteborg, Sweden Duration: 17 Sep 2006 → 20 Sep 2006

Name
Publisher	Eurosensors

Conference	The 20th European Conference on Solid-State Transducers (Eurosensors XX)
Period	17/09/06 → 20/09/06

Keywords

@inproceedings{acd8268d0db347d5b20c191042940172,

title = "A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT)",

keywords = "Elektrotechniek, Techniek, professional journal papers, Conf.proc. > 3 pag",

author = "G Pandraud and PJ French and PM Sarro",

year = "2006",

language = "Undefined/Unknown",

publisher = "Eurosensors",

pages = "1--4",

editor = "P Enoksson",

booktitle = "Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX",

note = "null ; Conference date: 17-09-2006 Through 20-09-2006",

}

Pandraud, G, French, PJ & Sarro, PM 2006, A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT). in P Enoksson (ed.), Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX. Eurosensors, s.l., pp. 1-4, The 20th European Conference on Solid-State Transducers (Eurosensors XX), 17/09/06.

Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX. ed. / P Enoksson. s.l. : Eurosensors, 2006. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT)

AU - Pandraud, G

AU - French, PJ

AU - Sarro, PM

PY - 2006

Y1 - 2006

KW - Elektrotechniek

KW - Techniek

KW - professional journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 1

EP - 4

BT - Proceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX

A2 - Enoksson, P

PB - Eurosensors

CY - s.l.

Y2 - 17 September 2006 through 20 September 2006

ER -