A comparison of PECVD silicon carbide and silicon nitride as materials for optical chemical sensing (U-SP-2-I-ICT)

G Pandraud, PJ French, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationProceedings of the The 20th European Conference on Solid-State Transducers (Eurosensors XX
EditorsP Enoksson
Place of Publications.l.
PublisherEurosensors
Pages1-4
Number of pages4
Publication statusPublished - 2006
EventThe 20th European Conference on Solid-State Transducers (Eurosensors XX) - Goteborg, Sweden
Duration: 17 Sept 200620 Sept 2006

Publication series

Name
PublisherEurosensors

Conference

ConferenceThe 20th European Conference on Solid-State Transducers (Eurosensors XX)
Period17/09/0620/09/06

Keywords

  • Elektrotechniek
  • Techniek
  • professional journal papers
  • Conf.proc. > 3 pag

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