A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors

Hui Jiang; Yang Liu; Luke Middelburg; Brahim  el Mansouri; Stoyan  Nihtianova

doi:10.1109/ICTA53157.2021.9661905

A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors

Hui Jiang, Yang Liu, Luke Middelburg, Brahim el Mansouri, Stoyan Nihtianova

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Abstract

This paper presents a continuous-time integrated readout interface for inertial sensors with high energy efficiency and high resolution. A dual digital-to-analog conversion (dual DAC) scheme is proposed which reduces the large DC baseline capacitance while preserving a high gain in the capacitance-to-voltage converter (CVC). A continuous-time delta-sigma modulator (CTΔΣM) is used to digitize the output signal of the CVC without kT/C noise. This results in a precision capacitive readout IC with a 5.5aF resolution in 0.5ms conversion time. It consumes 1.8mW. An inertial sensing system, consisting of the readout IC and a MEMS inertial sensor, achieves a resolution of 17.02ng/√Hz.

Original language	English
Title of host publication	2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)
Subtitle of host publication	Proceedings
Place of Publication	Danvers
Publisher	IEEE
Pages	14-15
Number of pages	2
ISBN (Electronic)	978-1-6654-1747-1
ISBN (Print)	978-1-6654-1748-8
DOIs	https://doi.org/10.1109/ICTA53157.2021.9661905
Publication status	Published - 2021
Event	2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA) - Zhuhai, China Duration: 24 Nov 2021 → 26 Nov 2021

Conference

Conference	2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)
Country/Territory	China
City	Zhuhai
Period	24/11/21 → 26/11/21

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10.1109/ICTA53157.2021.9661905

Cite this

@inproceedings{b6473a523ec84696a57c00002663d285,

title = "A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors",

abstract = "This paper presents a continuous-time integrated readout interface for inertial sensors with high energy efficiency and high resolution. A dual digital-to-analog conversion (dual DAC) scheme is proposed which reduces the large DC baseline capacitance while preserving a high gain in the capacitance-to-voltage converter (CVC). A continuous-time delta-sigma modulator (CTΔΣM) is used to digitize the output signal of the CVC without kT/C noise. This results in a precision capacitive readout IC with a 5.5aF resolution in 0.5ms conversion time. It consumes 1.8mW. An inertial sensing system, consisting of the readout IC and a MEMS inertial sensor, achieves a resolution of 17.02ng/√Hz.",

author = "Hui Jiang and Yang Liu and Luke Middelburg and {el Mansouri}, Brahim and Stoyan Nihtianova",

year = "2021",

doi = "10.1109/ICTA53157.2021.9661905",

language = "English",

isbn = "978-1-6654-1748-8",

pages = "14--15",

booktitle = "2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)",

publisher = "IEEE",

address = "United States",

note = "2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA) ; Conference date: 24-11-2021 Through 26-11-2021",

}

Jiang, H, Liu, Y, Middelburg, L , el Mansouri, B & Nihtianova, S 2021, A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors. in 2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA): Proceedings., 9661905, IEEE, Danvers, pp. 14-15, 2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA), Zhuhai, China, 24/11/21. https://doi.org/10.1109/ICTA53157.2021.9661905

A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors. / Jiang, Hui; Liu, Yang; Middelburg, Luke et al.
2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA): Proceedings. Danvers: IEEE, 2021. p. 14-15 9661905.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors

AU - Jiang, Hui

AU - Liu, Yang

AU - Middelburg, Luke

AU - el Mansouri, Brahim

AU - Nihtianova, Stoyan

PY - 2021

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N2 - This paper presents a continuous-time integrated readout interface for inertial sensors with high energy efficiency and high resolution. A dual digital-to-analog conversion (dual DAC) scheme is proposed which reduces the large DC baseline capacitance while preserving a high gain in the capacitance-to-voltage converter (CVC). A continuous-time delta-sigma modulator (CTΔΣM) is used to digitize the output signal of the CVC without kT/C noise. This results in a precision capacitive readout IC with a 5.5aF resolution in 0.5ms conversion time. It consumes 1.8mW. An inertial sensing system, consisting of the readout IC and a MEMS inertial sensor, achieves a resolution of 17.02ng/√Hz.

AB - This paper presents a continuous-time integrated readout interface for inertial sensors with high energy efficiency and high resolution. A dual digital-to-analog conversion (dual DAC) scheme is proposed which reduces the large DC baseline capacitance while preserving a high gain in the capacitance-to-voltage converter (CVC). A continuous-time delta-sigma modulator (CTΔΣM) is used to digitize the output signal of the CVC without kT/C noise. This results in a precision capacitive readout IC with a 5.5aF resolution in 0.5ms conversion time. It consumes 1.8mW. An inertial sensing system, consisting of the readout IC and a MEMS inertial sensor, achieves a resolution of 17.02ng/√Hz.

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DO - 10.1109/ICTA53157.2021.9661905

M3 - Conference contribution

SN - 978-1-6654-1748-8

SP - 14

EP - 15

BT - 2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)

PB - IEEE

CY - Danvers

T2 - 2021 IEEE International Conference on Integrated Circuits, Technologies and Applications (ICTA)

Y2 - 24 November 2021 through 26 November 2021

ER -

A Continuous-Time Readout IC with 0.12 aF/√Hz for Capacitive Inertial Sensors

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