A critical literature review of focused electron beam induced deposition

WF van Dorp, CW Hagen

    Research output: Contribution to journalArticleScientificpeer-review

    370 Citations (Scopus)
    Original languageUndefined/Unknown
    JournalJournal of Applied Physics
    Volume104
    Publication statusPublished - 2008

    Keywords

    • CWTS 0.75 <= JFIS < 2.00

    Cite this