A critical literature review of focused electron beam induced deposition

WF van Dorp, CW Hagen

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{24c36f215374417597b7c6b00bcbc8fd,

title = "A critical literature review of focused electron beam induced deposition",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "{van Dorp}, WF and CW Hagen",

year = "2008",

language = "Undefined/Unknown",

volume = "104",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

}