A Cryo-CMOS Smart Temperature Sensor for the Ultrawide Temperature Range From 5 K to 296 K

Cerviño C. Fungueiriño; L. A. Enthoven; J. van Staveren; M. Babaie; F. Sebastiano

doi:10.1109/LSSC.2025.3650657

A Cryo-CMOS Smart Temperature Sensor for the Ultrawide Temperature Range From 5 K to 296 K

Cerviño C. Fungueiriño^*, L. A. Enthoven, J. van Staveren, M. Babaie, F. Sebastiano

^*Corresponding author for this work

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Abstract

This work presents a cryo-CMOS smart temperature sensor operating from room temperature down to 5 K. By adopting sensing elements (CMOS bulk diodes, pMOS/DTMOS in weak inversion) that circumvent the poor cryogenic performance of Si BJTs, a robust switched-capacitor second-order sigma–delta readout and cryogenic-aware design techniques, the sensor achieves a maximum error of ±0.73 K (four samples and two-point trim), a resolution below 0.05 K for a 102.4-ms readout duration, and a power consumption of 15.5 µW 93.5 µW) at 5 K (296 K).

Original language	English
Pages (from-to)	29-32
Number of pages	4
Journal	IEEE Solid-State Circuits Letters
Volume	9
DOIs	https://doi.org/10.1109/LSSC.2025.3650657
Publication status	Published - 2026

Keywords

Analog to digital conversion
bulk CMOS
CMOS
cryo-CMOS
cryogenic
diode
oversampled
reference
temperature sensor

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10.1109/LSSC.2025.3650657

A_Cryo-CMOS_Smart_Temperature_Sensor_for_the_Ultrawide_Temperature_Range_From_5_K_to_296_KFinal published version, 1.31 MBLicence: CC BY

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@article{094ae8ada1ff4a2ea7fa828d66892128,

title = "A Cryo-CMOS Smart Temperature Sensor for the Ultrawide Temperature Range From 5 K to 296 K",

abstract = "This work presents a cryo-CMOS smart temperature sensor operating from room temperature down to 5 K. By adopting sensing elements (CMOS bulk diodes, pMOS/DTMOS in weak inversion) that circumvent the poor cryogenic performance of Si BJTs, a robust switched-capacitor second-order sigma–delta readout and cryogenic-aware design techniques, the sensor achieves a maximum error of ±0.73 K (four samples and two-point trim), a resolution below 0.05 K for a 102.4-ms readout duration, and a power consumption of 15.5 µW 93.5 µW) at 5 K (296 K).",

keywords = "Analog to digital conversion, bulk CMOS, CMOS, cryo-CMOS, cryogenic, diode, oversampled, reference, temperature sensor",

author = "Fungueiri{\~n}o, {Cervi{\~n}o C.} and Enthoven, {L. A.} and {van Staveren}, J. and M. Babaie and F. Sebastiano",

year = "2026",

doi = "10.1109/LSSC.2025.3650657",

language = "English",

volume = "9",

pages = "29--32",

journal = "IEEE Solid-State Circuits Letters",

issn = "2573-9603",

publisher = "IEEE",

}

TY - JOUR

T1 - A Cryo-CMOS Smart Temperature Sensor for the Ultrawide Temperature Range From 5 K to 296 K

AU - Fungueiriño, Cerviño C.

AU - Enthoven, L. A.

AU - van Staveren, J.

AU - Babaie, M.

AU - Sebastiano, F.

PY - 2026

Y1 - 2026

N2 - This work presents a cryo-CMOS smart temperature sensor operating from room temperature down to 5 K. By adopting sensing elements (CMOS bulk diodes, pMOS/DTMOS in weak inversion) that circumvent the poor cryogenic performance of Si BJTs, a robust switched-capacitor second-order sigma–delta readout and cryogenic-aware design techniques, the sensor achieves a maximum error of ±0.73 K (four samples and two-point trim), a resolution below 0.05 K for a 102.4-ms readout duration, and a power consumption of 15.5 µW 93.5 µW) at 5 K (296 K).

AB - This work presents a cryo-CMOS smart temperature sensor operating from room temperature down to 5 K. By adopting sensing elements (CMOS bulk diodes, pMOS/DTMOS in weak inversion) that circumvent the poor cryogenic performance of Si BJTs, a robust switched-capacitor second-order sigma–delta readout and cryogenic-aware design techniques, the sensor achieves a maximum error of ±0.73 K (four samples and two-point trim), a resolution below 0.05 K for a 102.4-ms readout duration, and a power consumption of 15.5 µW 93.5 µW) at 5 K (296 K).

KW - Analog to digital conversion

KW - bulk CMOS

KW - CMOS

KW - cryo-CMOS

KW - cryogenic

KW - diode

KW - oversampled

KW - reference

KW - temperature sensor

UR - http://www.scopus.com/inward/record.url?scp=105027274613&partnerID=8YFLogxK

U2 - 10.1109/LSSC.2025.3650657

DO - 10.1109/LSSC.2025.3650657

M3 - Article

AN - SCOPUS:105027274613

SN - 2573-9603

VL - 9

SP - 29

EP - 32

JO - IEEE Solid-State Circuits Letters

JF - IEEE Solid-State Circuits Letters

ER -

A Cryo-CMOS Smart Temperature Sensor for the Ultrawide Temperature Range From 5 K to 296 K

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Keywords

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