A fully coupled fem model of electromechanically acutated mems with squeeze film damping

SDA Hannot, DJ Rixen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of the asme 2009 IDETC/CIE 2009
Editors	s.n.
Publisher	ASME
Pages	1-8
Number of pages	8
ISBN (Print)	978-0-7918-3856-3
Publication status	Published - 2009

Name
Publisher	Asme

Keywords

@inproceedings{6d56f5256d4e45cf8aff45423466693b,

title = "A fully coupled fem model of electromechanically acutated mems with squeeze film damping",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "SDA Hannot and DJ Rixen",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-0-7918-3856-3",

publisher = "ASME",

pages = "1--8",

editor = "s.n.",

booktitle = "Proceedings of the asme 2009 IDETC/CIE 2009",

address = "United States",

}