A general correction to surface reaction models based on reactive sticking coefficients

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Keywords

@article{1419852d650e483d954e3f8fdb331f4c,

title = "A general correction to surface reaction models based on reactive sticking coefficients",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "R Dorsman and CR Kleijn",

year = "2007",

language = "Undefined/Unknown",

volume = "13",

pages = "91--97",

journal = "Chemical Vapor Deposition",

issn = "0948-1907",

publisher = "Wiley",

number = "2-3",

}