A highly miniaturized NDIR methane sensor

N.P. Ayerden, G. de Graaf, P. Enoksson, R.F. Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review


The increasing demand for handheld systems for absorption spectroscopy has triggered the development of microspectrometers at various wavelength ranges. Several MEMS implementations of the light source, interferometer/optical filter, and detector have already been reported in the literature. However, the size of microspectrometers is still limited by the required absorption path length in the sample gas cell. This paper presents a compact MEMS linear-variable optical filter (LVOF) where the resonator cavity of the filter is also used as a sample gas cell to measure the absorption of methane at 3392nm wavelength. The physical resonator cavity length is elongated 62.2-fold, using multiple reflections from highly reflective Bragg mirrors to achieve a sufficiently long effective optical absorption path. Although the LVOF would in principle enable operation as a robust portable microspectrometer, here it is used in a miniaturized NDIR methane sensor for wavelength selection and calibration. © (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Original languageEnglish
Title of host publicationProceedings of SPIE Micro-Optics 2016
EditorsHugo Thienpont, Jürgen Mohr, Hans Zappe, Hirochika Nakajima
Number of pages8
Publication statusPublished - 2016
EventMicro-Optics 2016 - Brussels, Belgium
Duration: 3 Apr 20163 Apr 2016

Publication series

NameProceedings of SPIE
ISSN (Electronic)0277-786X


ConferenceMicro-Optics 2016


  • Optical sensor
  • spectroscopy
  • mid-IR
  • Bragg mirror
  • Fizeau
  • methane
  • gas sensor


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