Abstract
A highly miniaturized, single-chip, large scanning range MOEMS scanner is demonstrated. This intrinsically-aligned, monolithically integrated device uses small angular displacement to provide a linear scanning range of 2000 μm in the lateral and 1000 μm in the vertical direction, at a working distance of 2 cm, with an average operating power lower than 170 mW. Within a footprint of only 7×10 mm2, the presented system fully integrates a photonic interferometer comprising a mirror, a silicon microlens and the MEMS actuator into a single chip, thus offering an unprecedentedly miniaturized scanning solution. The monolithic integration of all photonic components provides intrinsic alignment and excludes coupling losses often encountered in systems composed of discrete parts. No additional attenuation of the optical signal is observed during device operation. This small and high-performance device is suitable as complete system-on-chip for commercial, portable imaging applications.
Original language | English |
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Title of host publication | 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 25-28 |
Number of pages | 4 |
Volume | 2018-January |
ISBN (Electronic) | 978-1-5386-4782-0 |
DOIs | |
Publication status | Published - 2018 |
Event | MEMS 2018: 31st IEEE International Conference on Micro Electro Mechanical Systems - Belfast, United Kingdom Duration: 21 Jan 2018 → 25 Jan 2018 https://www.mems2018.org/ |
Conference
Conference | MEMS 2018 |
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Country/Territory | United Kingdom |
City | Belfast |
Period | 21/01/18 → 25/01/18 |
Internet address |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Keywords
- Optical waveguides
- Lenses
- Optical interferometry
- Silicon
- Mirrors
- Optical device fabrication
- Optical imaging