A hot implantation study on the evolution of defects in He ion implanted MgO

AV Fedorov, MA van Huis, A van Veen

    Research output: Contribution to journalArticleScientificpeer-review

    4 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)452-455
    Number of pages4
    JournalNuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
    Volume191
    Publication statusPublished - 2002

    Keywords

    • ZX CWTS JFIS < 1.00

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