A Lamb wave based liquid sensor for biomedical applications

This study presents an AlN based Lamb wave (A0 mode) liquid sensing device that can be used for biomedical applications. The Lamb wave device features a 1.5 μm composite membrane consisting of a 500 nm LPCVD SiN and a 1 μm of a c-axis oriented AlN film. A 45° rotated design was also considered for this project to reduce the reflections from the edges towards the output IDT. A liquid testing experiment involving IPA, DI water, and D-PBS was performed to see if the devices were able to differentiate between these liquids. The results showed that the fabricated Lamb wave devices exhibited sensitivity to mass loading and were able to distinguish between the liquids based on their phase, frequency, and gain characteristics. Notably, devices with the rotated design have shown a substantial increase in resonance by 15 dB, as well as enhanced sensitivity, when compared to the devices with the normal design. Furthermore, the devices featuring the normal design had a Q factor of 450, whereas devices with the rotated design exhibited a Q factor of 680, indicating superior performance of the latter. These findings suggest that a Lamb wave device with the 45° rotated IDT design holds considerable potential for liquid sensing, particularly in biomedical applications.