A large current scanning electron microscope with MEMS-based mutli-beam optics

T Ichimura, Y Ren, P Kruit

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

26 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. 38th International Conference on Micro & Nano Engineering
Editors s.n.
Place of Publications.n.
Publishers.n.
Pages1-4
Number of pages4
Publication statusPublished - 2012
Event38th International Conference on Micro & Nano Engineering MNE Toulouse, France - s.n.
Duration: 14 Sep 201220 Sep 2012

Publication series

Name
Publishers.n.

Conference

Conference38th International Conference on Micro & Nano Engineering MNE Toulouse, France
Period14/09/1220/09/12

Cite this

Ichimura, T., Ren, Y., & Kruit, P. (2012). A large current scanning electron microscope with MEMS-based mutli-beam optics. In s.n. (Ed.), Proc. 38th International Conference on Micro & Nano Engineering (pp. 1-4). s.n..