INIS
metrology
100%
extreme ultraviolet radiation
100%
harmonic generation
100%
wavelengths
31%
soft x radiation
31%
design
25%
optics
18%
industry
18%
microscopy
18%
diffraction
12%
resolution
12%
universities
12%
range
12%
optimization
12%
semiconductor materials
12%
fluctuations
12%
height
12%
density
12%
reflection
12%
tools
12%
tables
12%
algorithms
12%
norm
6%
visible spectra
6%
light sources
6%
manufacturing
6%
transistors
6%
power
6%
tolerance
6%
substrates
6%
multiplication factors
6%
lasers
6%
demand
6%
values
6%
grazing
6%
variations
6%
layers
6%
jets
6%
construction
6%
comparative evaluations
6%
compacts
6%
silicon
6%
synchrotrons
6%
illumination
6%
cost
6%
performance
6%
stability
6%
fibers
6%
configuration
6%
orientation
6%
size
6%
atomic force microscopy
6%
interferometry
6%
apertures
6%
houses
6%
availability
6%
gold
6%
gases
6%
Keyphrases
High numerical Aperture Optics
8%
Spectral Illumination
8%
Soft X-ray Range
8%
Reconstructed Structure
8%
Streak Imaging
8%
Femtosecond Fiber Laser
8%
Imaging Beamline
8%
Reflection Configuration
8%
Ultraviolet Microscopy
8%
Tight Tolerances
8%
Engineering
Light Ray
9%
Fiber Laser
9%