A Low Dark Count p-i-n Diode Based SPAD in CMOS Technology

C Veerappan, E Charbon

Research output: Contribution to journalArticleScientificpeer-review

68 Citations (Scopus)

Abstract

In this paper, a novel CMOS single-photon avalanche diode (SPAD) is presented, and the device is designed using a vertical p-i-n diode construction. The p-i-n diode with a wide depletion region enables a low-noise operation. The proposed design achieves dark count rates of 1.5 cps/μm2 at 11 V excess bias, while the photon detection probability (PDP) is greater than 40% from 460 to 600 nm. Through the operation at very high excess bias voltages, it is possible to reach the PDP compression point where sensitivity to the breakdown voltage is low, thus ensuring high PDP uniformity; this feature makes it, especially, suitable for multimegapixel SPAD arrays.
Original languageEnglish
Pages (from-to)65-71
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume63
Issue number1
DOIs
Publication statusPublished - 18 Sept 2015

Keywords

  • wide depletion
  • CMOS
  • p-i-n
  • single-photon avalanche diode (SPAD)
  • substrate isolation

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