A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers

H Sadeghian Marnani; JFL Goosen; A Bossche; F van Keulen

A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers

H Sadeghian Marnani, JFL Goosen, A Bossche, F van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

4 Citations (Scopus)

Abstract

Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mass of the molecules bound to the cantilever surface. This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbed molecules bound to the upper and lower surface on the resonance frequency has been studied. For various materials, the ratio between the thicknesses of the adsorbed layer and the cantilever where either stiffness or added mass is dominant will be determined. The critical ratio (which contribution of effect cancel each others) between the thickness of the adsorbed layer and the cantilever and ratio between stiffness and density of adsorbed layer and cantilever have been determined. The calculations show how the added mass and stiffness contribute to the resonant behavior. This model gives insight into the decoupling of both opposite effects and is expected to be useful for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects. Keywords: Adsorption, Resonance frequency, Stiffness, Cantilever, Resonator

Original language	Undefined/Unknown
Title of host publication	Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
Editors	SA Tadigadapa, BA Parviz, AK Henning
Place of Publication	San Jose, CA, USA
Publisher	SPIE
Pages	1-8
Number of pages	8
ISBN (Print)	9780819470607
Publication status	Published - 2008
Event	MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface - San Jose, CA, USA Duration: 19 Jan 2008 → 24 Jan 2008

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	6885
ISSN (Print)	0277-786X

Conference

Conference	MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
Period	19/01/08 → 24/01/08

Keywords

conference contrib. refereed
Peer-lijst tijdschrift

Cite this

Sadeghian Marnani, H., Goosen, JFL., Bossche, A., & van Keulen, F. (2008). A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers. In SA. Tadigadapa, BA. Parviz, & AK. Henning (Eds.), Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface (pp. 1-8). (Proceedings of SPIE- International Society for Optical Engineering; Vol. 6885). SPIE.

Sadeghian Marnani, H ; Goosen, JFL ; Bossche, A et al. / A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers. Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface. editor / SA Tadigadapa ; BA Parviz ; AK Henning. San Jose, CA, USA : SPIE, 2008. pp. 1-8 (Proceedings of SPIE- International Society for Optical Engineering).

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title = "A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers",

abstract = "Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mass of the molecules bound to the cantilever surface. This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbed molecules bound to the upper and lower surface on the resonance frequency has been studied. For various materials, the ratio between the thicknesses of the adsorbed layer and the cantilever where either stiffness or added mass is dominant will be determined. The critical ratio (which contribution of effect cancel each others) between the thickness of the adsorbed layer and the cantilever and ratio between stiffness and density of adsorbed layer and cantilever have been determined. The calculations show how the added mass and stiffness contribute to the resonant behavior. This model gives insight into the decoupling of both opposite effects and is expected to be useful for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects. Keywords: Adsorption, Resonance frequency, Stiffness, Cantilever, Resonator",

keywords = "conference contrib. refereed, Peer-lijst tijdschrift",

author = "{Sadeghian Marnani}, H and JFL Goosen and A Bossche and {van Keulen}, F",

year = "2008",

language = "Undefined/Unknown",

isbn = "9780819470607",

publisher = "SPIE",

pages = "1--8",

editor = "SA Tadigadapa and BA Parviz and AK Henning",

booktitle = "Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface",

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note = "MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface ; Conference date: 19-01-2008 Through 24-01-2008",

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Sadeghian Marnani, H, Goosen, JFL , Bossche, A & van Keulen, F 2008, A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers. in SA Tadigadapa, BA Parviz & AK Henning (eds), Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface. Proceedings of SPIE- International Society for Optical Engineering, vol. 6885, SPIE, San Jose, CA, USA, pp. 1-8, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface, 19/01/08.

A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers. / Sadeghian Marnani, H; Goosen, JFL ; Bossche, A et al.
Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface. ed. / SA Tadigadapa; BA Parviz; AK Henning. San Jose, CA, USA: SPIE, 2008. p. 1-8 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 6885).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers

AU - Sadeghian Marnani, H

AU - Goosen, JFL

AU - Bossche, A

AU - van Keulen, F

PY - 2008

Y1 - 2008

N2 - Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mass of the molecules bound to the cantilever surface. This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbed molecules bound to the upper and lower surface on the resonance frequency has been studied. For various materials, the ratio between the thicknesses of the adsorbed layer and the cantilever where either stiffness or added mass is dominant will be determined. The critical ratio (which contribution of effect cancel each others) between the thickness of the adsorbed layer and the cantilever and ratio between stiffness and density of adsorbed layer and cantilever have been determined. The calculations show how the added mass and stiffness contribute to the resonant behavior. This model gives insight into the decoupling of both opposite effects and is expected to be useful for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects. Keywords: Adsorption, Resonance frequency, Stiffness, Cantilever, Resonator

AB - Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mass of the molecules bound to the cantilever surface. This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbed molecules bound to the upper and lower surface on the resonance frequency has been studied. For various materials, the ratio between the thicknesses of the adsorbed layer and the cantilever where either stiffness or added mass is dominant will be determined. The critical ratio (which contribution of effect cancel each others) between the thickness of the adsorbed layer and the cantilever and ratio between stiffness and density of adsorbed layer and cantilever have been determined. The calculations show how the added mass and stiffness contribute to the resonant behavior. This model gives insight into the decoupling of both opposite effects and is expected to be useful for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects. Keywords: Adsorption, Resonance frequency, Stiffness, Cantilever, Resonator

KW - conference contrib. refereed

KW - Peer-lijst tijdschrift

M3 - Conference contribution

SN - 9780819470607

SP - 1

EP - 8

BT - Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface

A2 - Tadigadapa, SA

A2 - Parviz, BA

A2 - Henning, AK

PB - SPIE

CY - San Jose, CA, USA

T2 - MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface

Y2 - 19 January 2008 through 24 January 2008

ER -

Sadeghian Marnani H, Goosen JFL , Bossche A , van Keulen F. A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers. In Tadigadapa SA, Parviz BA, Henning AK, editors, Proceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface. San Jose, CA, USA: SPIE. 2008. p. 1-8. (Proceedings of SPIE- International Society for Optical Engineering).