A mechanistic model for adsorption-induced change in resonance response of submicron cantilevers

H Sadeghian Marnani, JFL Goosen, A Bossche, F van Keulen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Abstract

Submicron cantilever structures have been demonstrated to be extremely versatile sensors and have potential applications in physics, chemistry and biology. The basic principle in submicron cantilever sensors is the measurement of the resonance frequency shift due to the added mass of the molecules bound to the cantilever surface. This paper presents a theoretical model to predict the resonance frequency shift due to molecular adsorption on submicron cantilevers. The influence of the mechanical properties of the adsorbed molecules bound to the upper and lower surface on the resonance frequency has been studied. For various materials, the ratio between the thicknesses of the adsorbed layer and the cantilever where either stiffness or added mass is dominant will be determined. The critical ratio (which contribution of effect cancel each others) between the thickness of the adsorbed layer and the cantilever and ratio between stiffness and density of adsorbed layer and cantilever have been determined. The calculations show how the added mass and stiffness contribute to the resonant behavior. This model gives insight into the decoupling of both opposite effects and is expected to be useful for the optimal design of resonators with high sensitivity to molecular adsorption based on either stiffness or mass effects. Keywords: Adsorption, Resonance frequency, Stiffness, Cantilever, Resonator
Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE Vol. 6885, MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
EditorsSA Tadigadapa, BA Parviz, AK Henning
Place of PublicationSan Jose, CA, USA
PublisherSPIE
Pages1-8
Number of pages8
ISBN (Print)9780819470607
Publication statusPublished - 2008
EventMEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface - San Jose, CA, USA
Duration: 19 Jan 200824 Jan 2008

Publication series

Name
PublisherSPIE
NameProceedings of SPIE- International Society for Optical Engineering
Volume6885
ISSN (Print)0277-786X

Conference

ConferenceMEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
Period19/01/0824/01/08

Keywords

  • conference contrib. refereed
  • Peer-lijst tijdschrift

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