A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

Aleksandar Jovic; Gregory Pandraud; Nuria Sanchez Losilla; Juan Sancho; Kirill Zinoviev; Jose L. Rubio; E  Margallo Balbas; Lina Sarro

doi:10.1109/JMEMS.2018.2802321

A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

Aleksandar Jovic^*, Gregory Pandraud, Nuria Sanchez Losilla, Juan Sancho, Kirill Zinoviev, Jose L. Rubio, E Margallo Balbas, Lina Sarro

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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Abstract

In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm², this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.

Original language	English
Pages (from-to)	259-268
Number of pages	10
Journal	Journal of Microelectromechanical Systems
Volume	27
Issue number	2
DOIs	https://doi.org/10.1109/JMEMS.2018.2802321
Publication status	Published - 2018

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

Keywords

Al-SiO bimorph beam
integrated OCT
MEMS actuators

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A_MEMS_Actuator_System_for_an_Integrated_3-D_Optical_Coherent_Tomography_ScannerFinal published version, 3.5 MB

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title = "A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner",

abstract = "In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm2, this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.",

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author = "Aleksandar Jovic and Gregory Pandraud and {Sanchez Losilla}, Nuria and Juan Sancho and Kirill Zinoviev and Rubio, {Jose L.} and {Margallo Balbas}, E and Lina Sarro",

note = "Green Open Access added to TU Delft Institutional Repository {\textquoteleft}You share, we take care!{\textquoteright} – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public. ",

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AU - Jovic, Aleksandar

AU - Pandraud, Gregory

AU - Sanchez Losilla, Nuria

AU - Sancho, Juan

AU - Zinoviev, Kirill

AU - Rubio, Jose L.

AU - Margallo Balbas, E

AU - Sarro, Lina

N1 - Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

PY - 2018

Y1 - 2018

N2 - In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm2, this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.

AB - In this paper, we present an electrothermal biaxial MEMS actuator system, which provides x-A nd y-direction scanning for a fully integrated 3-D optical coherence tomography (OCT) scanner. An angular scanning range of 8° (corresponding to a 7-mm linear scanning range in both directions) is achieved, with an average power consumption of 150 mW. The resonant frequency is 668 and 297 Hz for x-A nd y-directions, respectively. With a footprint of only 2.5×2.5mm2, this system is part of a device which also integrates an optical waveguide and a collimated lens on the same chip, thus making the fully integrated, self-aligned, and miniaturized 3-D OCT scanners feasible.

KW - Al-SiO bimorph beam

KW - integrated OCT

KW - MEMS actuators

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IS - 2

ER -

A MEMS Actuator System for an Integrated 3-D Optical Coherent Tomography Scanner

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