Abstract
Flow sensors with high resolution (<200g/h/surdHz) and low offset drift (<pm 0.4mg/h) are essential in many microfluidic applications, such as flow cytometry and biological/chemical assays. Although thermal flow sensors can meet these specifications [1], [2], they measure flow velocity, so their calibration is fluid specific. Coriolis flow sensors [3]-[5] are a promising alternative because they measure mass flow and density regardless of fluid type, thus offering more flexibility. However, this has typically been at the expense of lower resolution, offset drift, and large footprint. This paper presents a mass-flow-to-digital converter (phi DC) based on a MEMS Coriolis mass flow sensor and a dedicated readout IC (ROIC). Compared to the state-of-the-art [5], it is more compact and has a digital output. Furthermore, it achieves a 3x improvement in resolution (100 g/h/ surd Hz) and a more than 2 ×improvement in zero stability (pm 0.35mg/h.
| Original language | English |
|---|---|
| Title of host publication | 2022 IEEE International Solid- State Circuits Conference (ISSCC) |
| Subtitle of host publication | Digest of technical papers |
| Editors | Laura C. Fujino |
| Place of Publication | Danvers |
| Publisher | IEEE |
| Pages | 68-70 |
| Number of pages | 3 |
| ISBN (Electronic) | 978-1-6654-2800-2 |
| ISBN (Print) | 978-1-6654-2801-9 |
| DOIs | |
| Publication status | Published - 2022 |
| Event | 2022 IEEE International Solid- State Circuits Conference (ISSCC) - Online at San Francisco, United States Duration: 20 Feb 2022 → 26 Feb 2022 |
Publication series
| Name | Digest of Technical Papers - IEEE International Solid-State Circuits Conference |
|---|---|
| Volume | 2022-February |
| ISSN (Print) | 0193-6530 |
Conference
| Conference | 2022 IEEE International Solid- State Circuits Conference (ISSCC) |
|---|---|
| Abbreviated title | ISSCC 2022 |
| Country/Territory | United States |
| City | Online at San Francisco |
| Period | 20/02/22 → 26/02/22 |
Bibliographical note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-careOtherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.