A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100g/h/surdHz Noise i Floor and Zero Stability of pm 0.35mg/h

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Abstract

Flow sensors with high resolution (<200g/h/surdHz) and low offset drift (<pm 0.4mg/h) are essential in many microfluidic applications, such as flow cytometry and biological/chemical assays. Although thermal flow sensors can meet these specifications [1], [2], they measure flow velocity, so their calibration is fluid specific. Coriolis flow sensors [3]-[5] are a promising alternative because they measure mass flow and density regardless of fluid type, thus offering more flexibility. However, this has typically been at the expense of lower resolution, offset drift, and large footprint. This paper presents a mass-flow-to-digital converter (phi DC) based on a MEMS Coriolis mass flow sensor and a dedicated readout IC (ROIC). Compared to the state-of-the-art [5], it is more compact and has a digital output. Furthermore, it achieves a 3x improvement in resolution (100 g/h/ surd Hz) and a more than 2 ×improvement in zero stability (pm 0.35mg/h.

Original languageEnglish
Title of host publication2022 IEEE International Solid- State Circuits Conference (ISSCC)
Subtitle of host publicationDigest of technical papers
EditorsLaura C. Fujino
Place of PublicationDanvers
PublisherIEEE
Pages68-70
Number of pages3
ISBN (Electronic)978-1-6654-2800-2
ISBN (Print)978-1-6654-2801-9
DOIs
Publication statusPublished - 2022
Event2022 IEEE International Solid- State Circuits Conference (ISSCC) - Online at San Francisco, United States
Duration: 20 Feb 202226 Feb 2022

Publication series

NameDigest of Technical Papers - IEEE International Solid-State Circuits Conference
Volume2022-February
ISSN (Print)0193-6530

Conference

Conference2022 IEEE International Solid- State Circuits Conference (ISSCC)
Abbreviated titleISSCC 2022
Country/TerritoryUnited States
CityOnline at San Francisco
Period20/02/2226/02/22

Bibliographical note

Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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