A MEMS reactor for atomic-scale microscopy of nanomaterials under industrially relevant conditions

JF Creemer, S Helveg, PJ Kooyman, AM Molenbroek, HW Zandbergen, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

81 Citations (Scopus)
Original languageEnglish
Pages (from-to)254-264
Number of pages11
JournalIEEE Journal of Microelectromechanical Systems
Issue number2
Publication statusPublished - 2010


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