A micromachining post-process module for RF silicon technology

PN Pham, TK Ng, M Bartek, PM Sarro, B Rejaei Salmassi, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	IEDM technical digest
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	1-4
Number of pages	4
ISBN (Print)	0-7803-6438-4
Publication status	Published - 2000
Event	2000 International Electron Devices Meeting, San Francisco - Piscataway Duration: 10 Dec 2000 → 13 Dec 2000

Name
Publisher	IEEE

Conference	2000 International Electron Devices Meeting, San Francisco
Period	10/12/00 → 13/12/00

Keywords

@inproceedings{32744322c0634af999d2e3bf4fe8f53f,

title = "A micromachining post-process module for RF silicon technology",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PN Pham and TK Ng and M Bartek and PM Sarro and {Rejaei Salmassi}, B and JN Burghartz",

year = "2000",

language = "Undefined/Unknown",

isbn = "0-7803-6438-4",

publisher = "IEEE Society",

pages = "1--4",

booktitle = "IEDM technical digest",

note = "2000 International Electron Devices Meeting, San Francisco ; Conference date: 10-12-2000 Through 13-12-2000",

}

TY - GEN

T1 - A micromachining post-process module for RF silicon technology

AU - Pham, PN

AU - Ng, TK

AU - Bartek, M

AU - Sarro, PM

AU - Rejaei Salmassi, B

AU - Burghartz, JN

PY - 2000

Y1 - 2000

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-6438-4

SP - 1

EP - 4

BT - IEDM technical digest

PB - IEEE Society

CY - Piscataway

T2 - 2000 International Electron Devices Meeting, San Francisco

Y2 - 10 December 2000 through 13 December 2000

ER -