A micromachining post-process module for RF silicon technology

PN Pham, TK Ng, M Bartek, PM Sarro, B Rejaei Salmassi, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

25 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationIEDM technical digest
Place of PublicationPiscataway
PublisherIEEE Society
Pages1-4
Number of pages4
ISBN (Print)0-7803-6438-4
Publication statusPublished - 2000
Event2000 International Electron Devices Meeting, San Francisco - Piscataway
Duration: 10 Dec 200013 Dec 2000

Publication series

Name
PublisherIEEE

Conference

Conference2000 International Electron Devices Meeting, San Francisco
Period10/12/0013/12/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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