A micromachining post-process module with pattern transfer in deep cavities for RF silicon technology

PN Pham, PM Sarro, TK Ng, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

12 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationTechnical digest
Place of PublicationPiscataway
PublisherIEEE
Pages345-348
Number of pages4
ISBN (Print)0-7803-5998-4
Publication statusPublished - 2001
Event14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken - Piscataway
Duration: 21 Jan 200125 Jan 2001

Publication series

Name
PublisherIEEE

Conference

Conference14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken
Period21/01/0125/01/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

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