A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points

R. Herfst, B. Dekker, G. Witvoet, W.E. Crowcombe, D. de Lange, Hamed Sadeghian Marnani

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)
25 Downloads (Pure)

Abstract

One of the major limitations in the speed of the atomic force microscope (AFM) is the bandwidth of the mechanical scanning stage, especially in the vertical (z) direction. According to the design principles of “light and stiff” and “static determinacy,” the bandwidth of the mechanical scanner is limited by the first eigenfrequency of the AFM head in case of tip scanning and by the sample stage
in terms of sample scanning. Due to stringent requirements of the system, simply pushing the first eigenfrequency to an ever higher value has reached its limitation. We have developed a miniaturized, high speed AFM scanner in which the dynamics of the z-scanning stage are made insensitive to its surrounding dynamics via suspension of it on specific dynamically determined points. This
resulted in a mechanical bandwidth as high as that of the z-actuator (50 kHz) while remaining insensitive to the dynamics of its base and surroundings. The scanner allows a practical z scan range of 2.1 µm. We have demonstrated the applicability of the scanner to the high speed scanning of nanostructures.
Original languageEnglish
Article number113703
Number of pages10
JournalReview of Scientific Instruments
Volume86
Issue number11
Publication statusPublished - 2015

Keywords

  • atomic force microscopy
  • image scanners
  • position sensitive detectors
  • atomic force microscopes
  • aluminium

Fingerprint

Dive into the research topics of 'A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points'. Together they form a unique fingerprint.

Cite this