A miniaturized, high frequency mechanical scanner for high speed atomic force microscope using suspension on dynamically determined points

R. Herfst, B. Dekker, G. Witvoet, W.E. Crowcombe, D. de Lange, Hamed Sadeghian Marnani

Research output: Contribution to journal › Article › Scientific › peer-review

17 Citations (Scopus)
41 Downloads (Pure)

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Material Science