Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure sensor area, while enabling wafer-scale fabrication. The response of the miniaturized pressure sensor is similar to that of the much larger state-of-the-art Si-based Pirani pressure sensors, demonstrating the potential of graphene-based Pirani sensors.
|Title of host publication||Proceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems|
|Place of Publication||Piscataway, NJ|
|Number of pages||4|
|Publication status||Published - 2018|
|Event||2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore|
Duration: 22 Apr 2018 → 26 Apr 2018
Conference number: 13th
|Conference||2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)|
|Period||22/04/18 → 26/04/18|
Bibliographical noteGreen Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care
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