A miniaturized low power Pirani pressure sensor based on suspended graphene

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Abstract

Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure sensor area, while enabling wafer-scale fabrication. The response of the miniaturized pressure sensor is similar to that of the much larger state-of-the-art Si-based Pirani pressure sensors, demonstrating the potential of graphene-based Pirani sensors.
Original languageEnglish
Title of host publicationProceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages11-14
Number of pages4
ISBN (Electronic)978-1-5386-5273-2
ISBN (Print)978-1-5386-5274-9
DOIs
Publication statusPublished - 2018
Event2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore
Duration: 22 Apr 201826 Apr 2018
Conference number: 13th

Conference

Conference2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
CountrySingapore
CitySingapore
Period22/04/1826/04/18

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