A miniaturized low power Pirani pressure sensor based on suspended graphene

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

12 Citations (Scopus)
53 Downloads (Pure)

Abstract

Worlds first graphene-based Pirani pressure sensor is presented. Due to the decreased area and low thickness, the graphene-based Pirani pressure sensor allows for low power applications down to 0.9 mW. Using an innovative, transfer-free process, suspended graphene beams are realized. This allows for up to 100x miniaturization of the pressure sensor area, while enabling wafer-scale fabrication. The response of the miniaturized pressure sensor is similar to that of the much larger state-of-the-art Si-based Pirani pressure sensors, demonstrating the potential of graphene-based Pirani sensors.
Original languageEnglish
Title of host publicationProceedings of the 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages11-14
Number of pages4
ISBN (Electronic)978-1-5386-5273-2
ISBN (Print)978-1-5386-5274-9
DOIs
Publication statusPublished - 2018
Event2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Singapore, Singapore
Duration: 22 Apr 201826 Apr 2018
Conference number: 13th

Conference

Conference2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Country/TerritorySingapore
CitySingapore
Period22/04/1826/04/18

Bibliographical note

Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project https://www.openaccess.nl/en/you-share-we-take-care

Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.

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