A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings 2011 12th International Conference on Thermal, Mechnical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
EditorsO De Saint Leger, More Editors
Place of PublicationPiscataway, NJ
PublisherIEEE Society
Pages1-5
ISBN (Print)978-1-4577-0107-8
DOIs
Publication statusPublished - 2011
EventEuroSimE 2011: 12th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - Linz, Austria
Duration: 18 Apr 201120 Apr 2011
Conference number: 12

Conference

ConferenceEuroSimE 2011
CountryAustria
CityLinz
Period18/04/1120/04/11

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