A new process for nanometer scale devices

Y Chen, P Hadley, CJPM Harmans, JE Mooij, GI Ng, SF Yoon

    Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

    1 Citation (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationSPIE
    Pages138-142
    Number of pages5
    Publication statusPublished - 1997

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