A new process for nanometer scale devices

Y Chen, P Hadley, CJPM Harmans, JE Mooij, GI Ng, SF Yoon

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationSPIE
Pages138-142
Number of pages5
Publication statusPublished - 1997

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