a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness

J Su, HW van Zeijl, SL Paalvast, PM Sarro, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

46 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationSAFE conferentie
Editors SN
Place of PublicationVeldhoven
PublisherSAFE
Pages394-397
Number of pages4
ISBN (Print)90-73461-44
Publication statusPublished - 2006
EventSAFE conferentie - Veldhoven
Duration: 23 Nov 200624 Nov 2006

Publication series

Name
PublisherSAFE

Conference

ConferenceSAFE conferentie
Period23/11/0624/11/06

Keywords

  • Conf.proc. > 3 pag

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