a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness

J Su, HW van Zeijl, SL Paalvast, PM Sarro, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	SAFE conferentie
Editors	SN
Place of Publication	Veldhoven
Publisher	SAFE
Pages	394-397
Number of pages	4
ISBN (Print)	90-73461-44
Publication status	Published - 2006
Event	SAFE conferentie - Veldhoven Duration: 23 Nov 2006 → 24 Nov 2006

Name
Publisher	SAFE

Conference	SAFE conferentie
Period	23/11/06 → 24/11/06

Keywords

@inproceedings{c776d6dd15c147cfb30a552c73fd530b,

title = "a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness",

keywords = "Conf.proc. > 3 pag",

author = "J Su and {van Zeijl}, HW and SL Paalvast and PM Sarro and {van Eijk}, J",

year = "2006",

language = "Undefined/Unknown",

isbn = "90-73461-44",

publisher = "SAFE",

pages = "394--397",

editor = "SN",

booktitle = "SAFE conferentie",

note = "null ; Conference date: 23-11-2006 Through 24-11-2006",

}

TY - GEN

T1 - a noval dual-side fabriation method for silicon plate springs with high out-of plane stifness

AU - Su, J

AU - van Zeijl, HW

AU - Paalvast, SL

AU - Sarro, PM

AU - van Eijk, J

PY - 2006

Y1 - 2006

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-44

SP - 394

EP - 397

BT - SAFE conferentie

A2 - SN, null

PB - SAFE

CY - Veldhoven

Y2 - 23 November 2006 through 24 November 2006

ER -