A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness

HW van Zeijl, SL Paalvast, PM Sarro, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Micromechanics Europe 2006
Editors	sn
Place of Publication	Southampton
Publisher	MMEW
Pages	1-8
Number of pages	8
ISBN (Print)	085432-848-3
Publication status	Published - 2006
Event	the 17th Micro Mechanics Europe Workshop - Southampton Duration: 3 Sep 2006 → 5 Sep 2006

Name
Publisher	MMEW

Conference	the 17th Micro Mechanics Europe Workshop
Period	3/09/06 → 5/09/06

Keywords

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title = "A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness",

keywords = "Conf.proc. > 3 pag",

author = "{van Zeijl}, HW and SL Paalvast and PM Sarro and {van Eijk}, J",

year = "2006",

language = "Undefined/Unknown",

isbn = "085432-848-3",

publisher = "MMEW",

pages = "1--8",

editor = "sn",

booktitle = "Micromechanics Europe 2006",

note = "null ; Conference date: 03-09-2006 Through 05-09-2006",

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TY - GEN

T1 - A Noval dual-side fabrication method for Silicon Plate Springs with high ouf-of-plane stiffness

AU - van Zeijl, HW

AU - Paalvast, SL

AU - Sarro, PM

AU - van Eijk, J

PY - 2006

Y1 - 2006

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 085432-848-3

SP - 1

EP - 8

BT - Micromechanics Europe 2006

A2 - sn, null

PB - MMEW

CY - Southampton

Y2 - 3 September 2006 through 5 September 2006

ER -