@inproceedings{f880ca1751144340b37b161e983a0db5,
title = "A novel dual-side fabrication method for silicon plate springs with high out-of-plane stiffness",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "J Su and {van Zeijl}, HW and SL Paalvast and PM Sarro and {van Eijk}, J",
year = "2006",
language = "Undefined/Unknown",
isbn = "90-73461-44-8",
publisher = "s.l.",
pages = "394--397",
editor = "s.n.",
booktitle = "Proceedings of SAFE 2006 Workshop on Semiconductor Advances for Future Electronics and Sensors",
note = "9th Annual Workshop on Semiconductor Advances for future Electronics and Sensors (SAFE 2006), Veldhoven, the Netherlands ; Conference date: 23-11-2006 Through 24-11-2006",
}