A novel dual-side fabrication method for silicon plate springs with high out-of plane stiffness

HW van Zeijl, J Su, SL Paalvast, PM Sarro, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings of the 17th MME MicroMechanics Europe Workshop
Editors s.n.
Place of PublicationSouthampton
PublisherH.Morgan Ed.
Pages209-212
Number of pages4
ISBN (Print)085432-648-3
Publication statusPublished - 2006
Eventthe 17th MME MicroMechanics Europe Workshop - Southampton
Duration: 3 Sep 20065 Sep 2006

Publication series

Name
PublisherH.Morgan Ed.

Conference

Conferencethe 17th MME MicroMechanics Europe Workshop
Period3/09/065/09/06

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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