A novel heterodyne displacement interferometer with no detactable periodic nnlinearity and optical resolution doubling

K Joo, JD Ellis, ES Buice, JW Spronck, RH Munnig Schmidt

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of the euspen International Conference, Delft, June 2010
EditorsH Spaan, P Shore
Place of PublicationDelft
PublisherEUSPEN
Pages67-70
Number of pages4
ISBN (Print)13 978-0-9553082-8-4
Publication statusPublished - 2010
EventEuspen 10th International Conference for the European Society for Precision Engineering & Nanotechnology - Delft
Duration: 31 May 20104 Jun 2010

Publication series

Name
PublisherEuspen
Name
VolumeI

Conference

ConferenceEuspen 10th International Conference for the European Society for Precision Engineering & Nanotechnology
Period31/05/104/06/10

Keywords

  • Conf.proc. > 3 pag

Cite this