@article{e5248d5474ad482db6635a504f129445,
title = "A novel method for nanoprecision alignment in wafer bonding applications",
keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "LD Jiang and G Pandraud and PJ French and S.M. Spearing and M. kraft",
year = "2007",
language = "Undefined/Unknown",
volume = "17",
pages = "S61--S67",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing",
number = "7",
}