@inproceedings{86e876473e694ebfa4d83d0aa374a78c,
title = "A novel micromachining process using pattern transfer over large topography for RF silicon technology",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "PN Pham and PM Sarro and TK Ng and R Behzad and JN Burghartz",
year = "2000",
language = "Undefined/Unknown",
isbn = "90-73461-24-3",
publisher = "STW Technology Foundation",
pages = "125--128",
editor = "{JP Veen}",
booktitle = "SAFE-ProRISC-SeSens 2000: proceedings",
note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",
}